化工进展

• 材料科学与技术 • 上一篇    下一篇

多晶硅制备工艺及发展趋势

王晓英1,王宇光2,谷新春2,刘 颖2   

  1. 1吉林工商学院食品工程分院,吉林 长春130062;2 中国化学赛鼎宁波工程有限公司,浙江 宁波 315040
  • 出版日期:2013-06-05 发布日期:2013-06-05

Progress in preparation technology of polysilicon

WANG Xiaoying1,WANG Yuguang2,GU Xinchun2,LIU Ying2   

  1. 1 Jilin Business and Technology College,Changchun 130062,Jilin,China;2 SEDIN Ningbo Engineering Co.,Ltd.,Ningbo 315040,Zhejiang,China
  • Online:2013-06-05 Published:2013-06-05

摘要: 简述了国内外多晶硅生产工艺的发展和现状,对比分析了各种多晶硅制备方法在产能、能耗及环境友好特性等方面的特点及其发展趋势。提出目前多晶硅制备技术主要有3个发展方向:①不断改进西门子工艺,包括尾气分离,四氯化硅氢化制备三氯氢硅,改进还原炉结构,加大炉体直径以提高产量、降低成本,三氯氢硅及氢气的纯化;②不断完善流态化技术方法,包括降低反应器内壁面上的硅沉积、减少无定形硅粉的形成、硅烷制备技术的改善;③不断完善冶金法工艺体系,包括提高产品纯度、减少杂质含量的波动性。

关键词: 多晶硅, 进展, 流态化, 物理法, 多晶硅, 流化床法, 冶金法, 西门子法

Abstract: The present status of polysilicon production technology is investigated. The capacity,energy consumption and environment-friendly features of various methods are compared for the preparation of polysilicon. Three main directions of present development in the production of polycrystalline silicon were proposed:① the improvement of Siemens process,including exhaust gas separation,trichlorosilane production by the hydrogenation of silicon tetrachloride,improved reduction furnace structure,increased furnace diameter for the increase of production,and the purification of trichlorosilane and hydrogen;② the improvement of fluidized bed methods,including the decrease of silicon deposition on the surface of the inner wall of a reactor,the reduction of the formation of amorphous silica particle and the improvement of silane preparation technology;③ the improvement of metallurgical method,including the improvement of product purity,the reduction of the volatility of impurity content.

Key words: polysilicon, progress, fluidized bed method, metallurgy method, polysilicon, fluidized bed method, metallurgy method, SIMENS method

京ICP备12046843号-2;京公网安备 11010102001994号
版权所有 © 《化工进展》编辑部
地址:北京市东城区青年湖南街13号 邮编:100011
电子信箱:hgjz@cip.com.cn
本系统由北京玛格泰克科技发展有限公司设计开发 技术支持:support@magtech.com.cn