关键词: 多晶硅, 进展, 流态化, 物理法, 多晶硅, 流化床法, 冶金法, 西门子法

Abstract: The present status of polysilicon production technology is investigated. The capacity，energy consumption and environment-friendly features of various methods are compared for the preparation of polysilicon. Three main directions of present development in the production of polycrystalline silicon were proposed：① the improvement of Siemens process，including exhaust gas separation，trichlorosilane production by the hydrogenation of silicon tetrachloride，improved reduction furnace structure，increased furnace diameter for the increase of production，and the purification of trichlorosilane and hydrogen；② the improvement of fluidized bed methods，including the decrease of silicon deposition on the surface of the inner wall of a reactor，the reduction of the formation of amorphous silica particle and the improvement of silane preparation technology；③ the improvement of metallurgical method，including the improvement of product purity，the reduction of the volatility of impurity content.

Key words: polysilicon, progress, fluidized bed method, metallurgy method, polysilicon, fluidized bed method, metallurgy method, SIMENS method