关键词: 硅烷, 电子特气, 氯硅烷, 电子材料, 电子化学品

Abstract:

High-purity monosilane is the most important silicon-containing gas in semiconductor industry, and is widely used in areas such as integrated circuit, photovoltaics, display panel, and battery cells for electric vehicle. However, it has previously been a monopoly of the US, Japan, South Korea, et al. This article reviewed the localization journey of monosilane technology, and introduced the new mass production technology of high-purity monosilane innovated by the authors' group based on the chlorosilane route and the reactive distillation technology, the product of which had been delivered to fields including photovoltaic, display panel, integrated circuit and so on. Prospects of the electronic-grade monosilane industry was presented, holding that represented by the authors' approach, the chlorosilane route would be in the mainstream in future, while the magnesium silicide route would be a convenient way for co-production of monosilane and disilane. It was also pointed out that developing platform enterprises via integration and innovation of associated technologies for multiple products or co-products would be the development direction of monosilane industry.

Key words: silane, electronic special gas, chlorosilane, electronic material, electronic chemical