基于激光诱导石墨烯的应变传感器研究进展

doi:10.16085/j.issn.1000-6613.2023-1343

摘要/Abstract

摘要：

激光诱导石墨烯（LIG）是通过激光直接照射碳前体得到的一种三维多孔石墨烯材料。凭借制备过程简单、可任意图案化、价廉质优等优势，LIG在柔性应变传感器领域受到极大关注，已广泛应用于医疗健康、运动监测、人机交互等领域。本文着重介绍了LIG的制备工艺，激光参数、碳前体及掺杂改性等影响其结构-性能的因素，以及LIG在柔性应变传感器应用的最新进展，其中激光参数包括激光功率和扫描速率、图像密度、焦距及气氛环境；碳前体包括芳香族聚合物和天然材料；掺杂改性包括原位掺杂和后处理掺杂。指出开发生物兼容性高、可降解的碳前体是电子产品可再生性和可持续性的重要需求，大变形、快响应是LIG基柔性可穿戴传感器的探索目标，多功能传感集成是LIG基柔性可穿戴传感器的发展趋势。

关键词: 电子材料, 复合材料, 纳米结构, 激光诱导石墨烯, 应变传感器

Abstract:

Laser induced graphene (LIG) is a three-dimensional porous graphene material obtained by direct laser irradiation of carbon precursors. With the advantages of simple preparation process, arbitrary patterning, low cost and high quality, LIG has received great attention in the field of flexible strain sensors, and has been widely used in medical health, motion monitoring, human-computer interaction and other fields. In this paper, the preparation process of LIG, the structure-properties influence factors of laser parameters, carbon precursors and doping modification, and the latest development of LIG application in flexible strain sensors were introduced. The laser parameters included laser power and scanning rate, image density, focal length and atmosphere. Carbon precursors included aromatic polymers and natural materials. Doping modification included in-situ doping and post-treatment doping. It was pointed out that the development of biocompatible and biodegradable carbon precursors was an important requirement for the renewability and sustainability of electronic products. Furthermore, large deformation and fast response were the exploration goals of LIG flexible wearable sensors, and multi-functional sensor integration was the development trend of LIG flexible wearable sensors.

Key words: electronic materials, composites, nanostructure, laser-induced graphene, strain sensor

中图分类号:

慕铭, 赵伟伟, 陈光孟, 刘小青. 基于激光诱导石墨烯的应变传感器研究进展[J]. 化工进展, 2024, 43(9): 4970-4979.

MU Ming, ZHAO Weiwei, CHEN Guangmeng, LIU Xiaoqing. Research progress of strain sensor based on laser-induced graphene[J]. Chemical Industry and Engineering Progress, 2024, 43(9): 4970-4979.

图/表 7

参考文献 53

1	CHOONG Chwee-Lin, SHIM Mun-Bo, LEE Byoung-Sun, et al. Highly stretchable resistive pressure sensors using a conductive elastomeric composite on a micropyramid array[J]. Advanced Materials, 2014, 26(21): 3451-3458.
2	TAO Luqi, ZHANG Kunning, TIAN He, et al. Graphene-paper pressure sensor for detecting human motions[J]. ACS Nano, 2017, 11(9): 8790-8795.
3	NOVOSELOV K S, GEIM A K, MOROZOV S V, et al. Electric field effect in atomically thin carbon films[J]. Science, 2004, 306(5696): 666-669.
4	HERNAEZ Miguel. Applications of graphene-based materials in sensors[J]. Sensors, 2020, 20(11): 3196.
5	KABIRI AMERI Shideh, Rebecca HO, JANG Hongwoo, et al. Graphene electronic tattoo sensors[J]. ACS Nano, 2017, 11(8): 7634-7641.
6	LIU Qiang, CHEN Ji, LI Yingru, et al. High-performance strain sensors with fish-scale-like graphene-sensing layers for full-range detection of human motions[J]. ACS Nano, 2016, 10(8): 7901-7906.
7	MIAO Jinlei, FAN Tingting. Flexible and stretchable transparent conductive graphene-based electrodes for emerging wearable electronics[J]. Carbon, 2023, 202: 495-527.
8	HUMMERS William S, OFFEMAN Richard E. Preparation of graphitic oxide[J]. Journal of the American Chemical Society, 1958, 80(6): 1339.
9	REINA Alfonso, JIA Xiaoting, John HO, et al. Layer area, few-layer graphene films on arbitrary substrates by chemical vapor deposition[J]. Nano Letters, 2009, 9(8): 3087.
10	BERGER Claire, SONG Zhimin, LI Xuebin, et al. Electronic confinement and coherence in patterned epitaxial graphene[J]. Science, 2006, 312(5777): 1191-1196.
11	LIN Yuming, DIMITRAKOPOULOS C, JENKINS K A, et al. 100GHz transistors from wafer-scale epitaxial graphene[J]. Science, 2010, 327(5966): 662.
12	JANG Houk, PARK Yong Ju, CHEN Xiang, et al. Graphene-based flexible and stretchable electronics[J]. Advanced Materials, 2016, 28(22): 4184-4202.
13	CHEN Zhaolong, QI Yue, CHEN Xudong, et al. Direct CVD growth of graphene on traditional glass: Methods and mechanisms[J]. Advanced Materials, 2019, 31(9): 1803639.
14	YI Min, SHEN Zhigang. A review on mechanical exfoliation for the scalable production of graphene[J]. Journal of Materials Chemistry A, 2015, 3(22): 11700-11715.
15	李文博, 王旭东, 宋延林. 石墨烯基墨水的制备及其在印刷电子中的应用[J]. 科技导报, 2017, 35(17): 30-36.
	LI Wenbo, WANG Xudong, SONG Yanlin. Preparation of graphene-based inks and their applications to printed electronics: A review[J]. Science & Technology Review, 2017, 35(17): 30-36.
16	LE Truong-Son Dinh, PHAN Hoang-Phuong, KWON Soongeun, et al. Recent advances in laser-induced graphene: Mechanism, fabrication, properties, and applications in flexible electronics [J]. Advanced Functional Materials, 2022, 32(48): 2205158.
17	LIN Jian, PENG Zhiwei, LIU Yuanyue, et al. Laser-induced porous graphene films from commercial polymers[J]. Nature Communications, 2014, 5: 5714.
18	PENG Yunyan, ZHAO Weiwei, NI Feng, et al. Forest-like laser-induced graphene film with ultrahigh solar energy utilization efficiency[J]. ACS Nano, 2021, 15(12): 19490-19502.
19	ZHAO Weiwei, JIANG Ye, YU Wenjie, et al. Wettability controlled surface for energy conversion[J]. Small, 2022, 18(31): 2202906.
20	LI Yilun, LUONG Duy Xuan, ZHANG Jibo, et al. Laser-induced graphene in controlled atmospheres: From superhydrophilic to superhydrophobic surfaces[J]. Advanced Materials, 2017, 29(27): 1700496.
21	ZHAO Weiwei, YU Wenjie, JIANG Ye, et al. Patterning of thermosetting resins via laser engraving towards efficient thermal management[J]. Nano Energy, 2022, 100: 107477.
22	NASSER Jalal, LIN Jiajun, ZHANG Lisha, et al. Laser induced graphene printing of spatially controlled super-hydrophobic/hydrophilic surfaces[J]. Carbon, 2020, 162: 570-578.
23	YU Wenjie, ZHAO Weiwei, WANG Shuaipeng, et al. Direct conversion of liquid organic precursor into 3D laser-induced graphene materials[J]. Advanced Materials, 2023, 35(9): 2209545.
24	ZHANG Zhuchan, SONG Mengmeng, HAO Junxing, et al. Visible light laser-induced graphene from phenolic resin: A new approach for directly writing graphene-based electrochemical devices on various substrates[J]. Carbon, 2018, 127: 287-296.
25	SINGH Swatantra P, LI Yilun, ZHANG Jibo, et al. Sulfur-doped laser-induced porous graphene derived from polysulfone-class polymers and membranes[J]. ACS Nano, 2018, 12(1): 289-297.
26	SINGH Sunpreet, PRAKASH Chander, RAMAKRISHNA Seeram. 3D printing of polyether-ether-ketone for biomedical applications[J]. European Polymer Journal, 2019, 114: 234-248.
27	YANG Weiwei, ZHAO Wei, LI Qiushi, et al. Fabrication of smart components by 3D printing and laser-scribing technologies[J]. ACS Applied Materials & Interfaces, 2020, 12(3): 3928-3935.
28	YE Ruquan, CHYAN Yieu, ZHANG Jibo, et al. Laser-induced graphene formation on wood[J]. Advanced Materials, 2017, 29(37): 1702211.
29	CHYAN Yieu, YE Ruquan, LI Yilun, et al. Laser-induced graphene by multiple lasing: Toward electronics on cloth, paper, and food[J]. ACS Nano, 2018, 12(3): 2176-2183.
30	BASU Aniruddha, ROY Kingshuk, SHARMA Neha, et al. CO₂ laser direct written MOF-based metal-decorated and heteroatom-doped porous graphene for flexible all-solid-state microsupercapacitor with extremely high cycling stability[J]. ACS Applied Materials & Interfaces, 2016, 8(46): 31841-31848.
31	YU Zeqi, YU Wenjie, JIANG Ye, et al. Upcycling of polybenzoxazine to magnetic metal nanoparticle-doped laser-induced graphene for electromagnetic interference shielding[J]. ACS Applied Nano Materials, 2022, 5(9): 13158-13170.
32	ZANG Xining, SHEN Caiwei, CHU Yao, et al. Laser-induced molybdenum carbide-graphene composites for 3D foldable paper electronics[J]. Advanced Materials, 2018, 30(26): 1800062.
33	YANG Weiwei, LIU Ying, LI Qiushi, et al. In situ formation of phosphorus-doped porous graphene via laser induction[J]. RSC Advances, 2020, 10(40): 23953-23958.
34	YE Ruquan, PENG Zhiwei, WANG Tuo, et al. In situ formation of metal oxide nanocrystals embedded in laser-induced graphene[J]. ACS Nano, 2015, 9(9): 9244-9251.
35	YU Wenjie, PENG Yunyan, CAO Lijun, et al. Free-standing laser-induced graphene films for high-performance electromagnetic interference shielding[J]. Carbon, 2021, 183: 600-611.
36	YUAN Min, LUO Feng, RAO Yifan, et al. SWCNT-bridged laser-induced graphene fibers decorated with MnO₂ nanoparticles for high-performance flexible micro-supercapacitors[J]. Carbon, 2021, 183: 128-137.
37	JIANG Ye, WAN Sijie, ZHAO Weiwei, et al. Reusable, magnetic laser-induced graphene for efficient removal of organic pollutants from water[J]. Carbon Letters, 2022, 32(4): 1047-1064.
38	LI Qi, BAI Ruijie, GAO Yang, et al. Laser direct writing of flexible sensor arrays based on carbonized carboxymethylcellulose and its composites for simultaneous mechanical and thermal stimuli detection[J]. ACS Applied Materials & Interfaces, 2021, 13(8): 10171-10180.
39	LIU Wen, HUANG Yihe, PENG Yudong, et al. Stable wearable strain sensors on textiles by direct laser writing of graphene[J]. ACS Applied Nano Materials, 2020, 3(1): 283-293.
40	LUO Sida, HOANG Phong Tran, LIU Tao. Direct laser writing for creating porous graphitic structures and their use for flexible and highly sensitive sensor and sensor arrays[J]. Carbon, 2016, 96: 522-531.
41	WANG Hao, ZHAO Zifen, LIU Panpan, et al. A soft and stretchable electronics using laser-induced graphene on polyimide/PDMS composite substrate[J]. NPJ Flexible Electronics, 2022, 6(1): 26.
42	RAHIMI Rahim, OCHOA Manuel, TAMAYOL Ali, et al. Highly stretchable potentiometric pH sensor fabricated via laser carbonization and machining of carbon-polyaniline composite[J]. ACS Applied Materials & Interfaces, 2017, 9(10): 9015-9023.
43	CHHETRY Ashok, SHARIFUZZAMAN Md, YOON Hyosang, et al. MoS₂-decorated laser-induced graphene for a highly sensitive, hysteresis-free, and reliable piezoresistive strain sensor[J]. ACS Applied Materials & Interfaces, 2019, 11(25): 22531-22542.
44	CHHETRY Ashok, SHARMA Sudeep, BARMAN Sharat Chandra, et al. Black phosphorus@Laser-engraved graphene heterostructure-based temperature-strain hybridized sensor for electronic-skin applications[J]. Advanced Functional Materials, 2021, 31(10): 2007661.
45	RAZA Tahir, TUFAIL Muhammad Khurram, Afzal ALI, et al. Wearable and flexible multifunctional sensor based on laser-induced graphene for the sports monitoring system[J]. ACS Applied Materials & Interfaces, 2022, 14(48): 54170-54181.
46	RAHIMI Rahim, OCHOA Manuel, YU Wuyang, et al. Highly stretchable and sensitive unidirectional strain sensor via laser carbonization[J]. ACS Applied Materials & Interfaces, 2015, 7(8): 4463-4470.
47	LIU Wen, CHEN Qian, HUANG Yihe, et al. In situ laser synthesis of Pt nanoparticles embedded in graphene films for wearable strain sensors with ultra-high sensitivity and stability[J]. Carbon, 2022, 190: 245-254.
48	QIAO Yancong, WANG Yunfan, TIAN He, et al. Multilayer graphene epidermal electronic skin[J]. ACS Nano, 2018, 12(9): 8839-8846.
49	WANG Zhongbao, WU Yigen, ZHU Bin, et al. Self-patterning of highly stretchable and electrically conductive liquid metal conductors by direct-write super-hydrophilic laser-induced graphene and electroless copper plating[J]. ACS Applied Materials & Interfaces, 2023, 15(3): 4713-4723.
50	ZHENG Hehui, WANG Han, YI Kunran, et al. Wearable LIG flexible stress sensor based on spider web bionic structure[J]. Coatings, 2023, 13(1): 155.
51	ZHAO Jing, ZHANG Guangyu, SHI Dongxia. Review of graphene-based strain sensors[J]. Chinese Physics B, 2013, 22(5): 057701.
52	LUONG Duy Xuan, YANG Kaichun, YOON Jongwon, et al. Laser-induced graphene composites as multifunctional surfaces[J]. ACS Nano, 2019, 13(2): 2579-2586. .
53	PINHEIRO Tomás, CORREIA Ricardo, MORAIS Maria, et al. Water peel-off transfer of electronically enhanced, paper-based laser-induced graphene for wearable electronics[J]. ACS Nano, 2022, 16(12): 20633-20646.

制备方法	传感材料	传感范围/%	灵敏度	稳定性	参考文献
原位	LIG/Ecoflex	14	8557.19	>10000	[38]
	LIG/PI织物	<4	27	1000	[39]
	LIG/PI	—	112	—	[40]
	LIG/PDMS	10	75	—	[41]
	PANI/LIG/Ecoflex	20	—	>12000	[42]
转移	MoS₂-LIG/PDMS	25	1242	>12000	[43]
	BP^①/LIG/SEBS	19.2	2765	>18400	[44]
	LIG/PDMS	100	3.54	10000	[45]
	LIG/PDMS	100	20000	1000	[46]
	Pt/LIG/PDMS	20	489.3	>5000	[47]
	LIG/Ecoflex	10	673	1000	[48]
	LMs^②/SHL^③-LIG/ Ecoflex	200	1.558	—	[49]
	LIG/PDMS	35	36.8	3000	[50]

制备方法	传感材料	传感范围/%	灵敏度	稳定性	参考文献
原位	LIG/Ecoflex	14	8557.19	>10000	[38]
	LIG/PI织物	<4	27	1000	[39]
	LIG/PI	—	112	—	[40]
	LIG/PDMS	10	75	—	[41]
	PANI/LIG/Ecoflex	20	—	>12000	[42]
转移	MoS₂-LIG/PDMS	25	1242	>12000	[43]
	BP^①/LIG/SEBS	19.2	2765	>18400	[44]
	LIG/PDMS	100	3.54	10000	[45]
	LIG/PDMS	100	20000	1000	[46]
	Pt/LIG/PDMS	20	489.3	>5000	[47]
	LIG/Ecoflex	10	673	1000	[48]
	LMs^②/SHL^③-LIG/ Ecoflex	200	1.558	—	[49]
	LIG/PDMS	35	36.8	3000	[50]

[1]	孙忻茹, 张秋怡, 卓建坤, 杨润, 姚强. CaCl₂复合热化学储热材料的研究进展[J]. 化工进展, 2024, 43(8): 4506-4515.
[2]	杨光, 姜瑞婷, 张玥, 符子剑, 刘伟. 五氧化二钒/碳纳米复合材料在超级电容器中的应用[J]. 化工进展, 2024, 43(7): 3857-3871.
[3]	赵伟刚, 张倩倩, 蓝钰玲, 闫雯, 周晓剑, 范毜仔, 杜官本. 真空绝热板芯材的研究进展与展望[J]. 化工进展, 2024, 43(7): 3910-3922.
[4]	江慧珍, 罗凯, 王艳, 费华, 吴登科, 叶卓铖, 曹雄金. 废弃生物质复合相变材料的构建与应用[J]. 化工进展, 2024, 43(7): 3934-3945.
[5]	杜倩, 侯明, 高冀芸, 杨黎, 鲁元佳, 郭胜惠. f-Ti₃C₂T _x /ZIF-8异质结构增强NO₂气体传感器的敏感性能[J]. 化工进展, 2024, 43(7): 3946-3954.
[6]	张世蕊, 范朕连, 宋慧平, 张丽娜, 高宏宇, 程淑艳, 程芳琴. 粉煤灰负载光催化材料的研究进展[J]. 化工进展, 2024, 43(7): 4043-4058.
[7]	刘梦凡, 王华伟, 王亚楠, 张艳茹, 蒋旭彤, 孙英杰. Bio-FeMnCeO _x 活化PMS降解四环素效能与机制[J]. 化工进展, 2024, 43(6): 3492-3502.
[8]	杨磊, 邱广薇, 李思言, 葛宏程, 孙园园, 王菲, 范晓光. 基于温度和葡萄糖双重响应性共聚物微囊的胰岛素控释载体[J]. 化工进展, 2024, 43(6): 3277-3284.
[9]	曾浩桀, 周媚, 邹镇远, 熊峰, 曾星星, 刘宝玉. 表面钝化型二维ZSM-5分子筛的制备及甲苯与甲醇烷基化性能[J]. 化工进展, 2024, 43(5): 2696-2704.
[10]	刘雨蓉, 王兴宝, 李文英. 分子筛负载Pt催化剂酸性位点调控及对蒽深度加氢性能的影响[J]. 化工进展, 2024, 43(4): 1832-1839.
[11]	熊文婷, 罗启基, 鄢春根. 二氧化硅基气凝胶材料及其制备技术的专利分析[J]. 化工进展, 2024, 43(4): 1912-1922.
[12]	郭迎春, 梁晓怿. 柠檬酸改性球形活性炭对氨气吸附性能的影响[J]. 化工进展, 2024, 43(2): 1082-1088.
[13]	见禹, 陈宝明, 宫晗语. 基于分级结构骨架相变储热系统强化传热特性[J]. 化工进展, 2024, 43(2): 649-658.
[14]	代洪静, 马学虎, 王四芳. 低中放射性废水处理吸附技术及材料[J]. 化工进展, 2024, 43(1): 529-540.
[15]	张明焱, 刘燕, 张雪婷, 刘亚科, 李从举, 张秀玲. 非贵金属双功能催化剂在锌空气电池研究进展[J]. 化工进展, 2023, 42(S1): 276-286.