Abstract:

SF₆ has important applications in industrial technology such as ultra-large-scale integrated circuits and ultra-high voltage power equipment. However, SF₆ is also the most potent greenhouse gas with an extremely long atmospheric lifetime and an extremely high global warming potential. Excessive emissions would pose a high threat to global warming and environmental degradation. Therefore, under the national strategic background of "energy conservation and emission reduction" and "dual carbon" policy, achieving high-efficiency and low-energy separation and recovery of SF₆ from low-concentration SF₆/N₂ mixed gas is of great significance to the development of semiconductor manufacturing industry and environmental protection. Among the numerous SF₆/N₂ mixed gas separation technologies, adsorption separation based on porous materials is an energy-saving and environmentally friendly preferred solution. This paper introduced the current separation methods of SF₆/N₂ mixed gas, focusing on the adsorption separation of SF₆ using porous adsorption materials such as zeolites, metal organic frameworks (MOFs), porous organic polymers (POCs) and covalent organic frameworks (COFs). Among these adsorption materials, MOFs had higher SF₆ adsorption capacity, adsorption selectivity and good regeneration performance. However, due to the poor tradeoff between adsorption capacity and selectivity of SF6 by MOFs and the fact that high selectivity and high adsorption capacity cannot exist simultaneously, it was believed that tradeoff was a challenge for the adsorption of SF6 gas by MOFs. Therefore, this paper focused on reviewing the research progress of MOFs materials for SF₆/N₂ separation. Finally, the development problems of SF₆ adsorption separation were summarized, and the future development direction of this field was prospected.

Key words: sulfur hexafluoride, adsorption separation, porous material, metal organic frameworks (MOFs), tradeoff

摘要：

SF₆在超大规模集成电路和超高压电力设备等工业技术领域具有重要的应用。但SF₆也是最强效的温室气体之一，具有极长的大气寿命和超高的全球变暖潜能值，过度排放对全球变暖和环境恶化存在极高的威胁。因此，在“节能减排”和“双碳”政策的国家战略背景下，从低浓度的SF₆/N₂混合气体中高效率和低能耗地回收SF₆对半导体制造业的发展和环境保护具有重要的意义。在众多的SF₆/N₂混合气体分离技术中，基于多孔材料的吸附分离是一种节能环保的优选方案。本文介绍了当前对SF₆/N₂混合气体的分离方法，重点阐述了采用沸石、金属有机骨架（MOFs）和多孔有机聚合物（POCs）以及共价有机框架（COFs）等多孔吸附材料对SF₆的吸附分离。在这些吸附材料中，MOFs具有较高的SF₆吸附能力、吸附选择性和良好的可再生性能，但由于MOFs对SF₆的吸附量和选择性之间权衡性较差，高选择性和高吸附量不能同时存在，所以权衡性差是MOFs吸附SF₆气体的一个挑战。因此，本文着重综述了MOFs材料对SF₆/N₂分离的研究进展及如何解决权衡性问题。最后，对SF₆吸附分离领域发展面临的问题进行归纳总结，并对该领域未来的发展方向进行了展望。

关键词: 六氟化硫, 吸附分离, 多孔材料, 金属有机骨架, 权衡性