Analysis of energy and consumption reduction in adsorption recovery of electronic HF

doi:10.16085/j.issn.1000-6613.2020-1721

Abstract

Abstract:

The recovery of electronic-grade hydrogen fluoride (HF) gas has good economic, environmental and social benefits, and adsorption is one of the most promising methods for its recycling. However, the problem of high energy requirement limits its further development, and the research on the energy conservation and consumption reduction has not been conducted for this process. The performance of the adsorption cycle was studied by calculating a series of indexes such as energy consumption. The adsorption equilibrium isotherm data of HF was calculated by molecular simulation technique. The numerical model of temperature swing adsorption (TSA) was established, which was used to determine the index parameters of evaluation cycle efficiency. The operating parameters such as adsorption temperature and pressure were changed to analyze the changing trends of the cycle indicators such as energy consumption and energy efficiency, so as to explore the direction of reducing energy consumption and improving efficiency. The results showed that when the adsorption temperature decreased from 298K to 288K, the recycling energy consumption reduced from 14.0912MJ/kg to 3.1173MJ/kg HF, and the energy utilization efficiency increased from 0.02 to 0.0953. Moreover, as the desorption temperature increased from 340K to 350K, the recycling energy consumption reduced from14.0912MJ/kg to 12.0037MJ/kg HF, and the energy utilization efficiency increased from 0.02 to 0.0247. These results indicated that reducing the adsorption temperature is more significant in reducing energy consumption and improving energy efficiency. In addition, the following conclusions were also obtained: increasing intake concentration had positive effects on all the indexes while the increase of adsorption pressure only had a great influence on the recovery rate. The temperature difference between hot and cold sources and operation only affected the yield.

Key words: hydrogen fluoride (HF), molecular simulation, recovery, desorption, energy consumption, temperature swing adsorption

摘要：

电子级氟化氢（HF）气体的回收具有良好的经济、环境、社会效益，吸附法是最有希望实现回收的方式之一。然而能耗问题限制其进一步发展，如何对其展开节能降耗尚未见专题研究。本文通过对吸附循环能耗等指标的计算，对吸附循环的性能展开了探索性研究。采用分子模拟技术，计算获得HF的吸附平衡等温线数据；建立变温吸附循环数值模型，明确评价循环效能的指标参数；改变吸附温度、压力等运行参数，分析能耗、能效等循环指标的变化趋势，探索降低能耗提升效率的方向。计算结果表明：吸附温度由298K降低到288K，回收单位质量HF能耗由14.0912MJ/kg降低为3.1173MJ/kg，能量利用效率由0.02升高到0.0953；解吸温度由340K升高到350K，能耗降低为12.0037MJ/kg，能量利用效率升高到0.0247。可以看出，降低吸附温度对降低能耗、提升能效的作用更加明显。此外，还得到以下结论：提高进气浓度对各指标均有积极影响；提高吸附压力仅对回收率有较大影响；冷热源与操作温度的差值仅影响产率大小。

关键词: 氟化氢, 分子模拟, 回收, 解吸，脱附, 能耗, 变温吸附

CLC Number:

O647.3

WANG Jiajun, DENG Shuai, ZHAO Ruikai, ZHAO Li. Analysis of energy and consumption reduction in adsorption recovery of electronic HF[J]. Chemical Industry and Engineering Progress, 2021, 40(7): 3645-3655.

王傢俊, 邓帅, 赵睿恺, 赵力. 电子级HF吸附法回收的节能降耗潜力分析[J]. 化工进展, 2021, 40(7): 3645-3655.

Figures/Tables 25

原子名称	$ε / k B / K$	σ/?	电荷（e^-）
Cu	2.516	3.11	1.248
O	48.158	3.03	-0.624
C1	47.856	3.47	0.494
C2	47.856	3.47	0.13
C3	47.856	3.47	-0.156
H	7.65	2.85	0.156
F_ hf	60.0	2.830	0.592
H_ hf	0	0	0.592
HF_ w	0	0	-1.184

原子名称	$ε / k B / K$	σ/?	电荷（e^-）
Cu	2.516	3.11	1.248
O	48.158	3.03	-0.624
C1	47.856	3.47	0.494
C2	47.856	3.47	0.13
C3	47.856	3.47	-0.156
H	7.65	2.85	0.156
F_ hf	60.0	2.830	0.592
H_ hf	0	0	0.592
HF_ w	0	0	-1.184

键的形式	键的长度/?
F—H	0.973
F—X	0.1647

个数	测试温度/K	测试压力/Pa
1	298	1000
2	300	10000
3	313	20000
4	330	50000
5	340	70000
6	360	—
7	380	—
8	400	—
9	420	—

吸附平衡等温线模型	模型表达式	模型参数表达式
Langmuir模型	$q = q K m p 1 + K p$	$K = K 0 e x p Q R T$	$q m = a T + b$
Toth模型	$q = q m K p [1 + (K p) d] (1 / d)$	$K = K 0 e x p Q R T$	$d = d 0 + α 1 - T 0 T$
Sips模型	$q = q m ? (K p) c 1 + (K p) c$	$K = K 0 e x p Q R T$	$c = c 0 + α T T 0 - 1$

吸附平衡等温线模型	模型表达式	模型参数表达式
Langmuir模型	$q = q K m p 1 + K p$	$K = K 0 e x p Q R T$	$q m = a T + b$
Toth模型	$q = q m K p [1 + (K p) d] (1 / d)$	$K = K 0 e x p Q R T$	$d = d 0 + α 1 - T 0 T$
Sips模型	$q = q m ? (K p) c 1 + (K p) c$	$K = K 0 e x p Q R T$	$c = c 0 + α T T 0 - 1$

参数	数值
管壳内管几何尺（d_i）/cm	3
管壳外管几何尺（d_o）/cm	3.18
比换热面积（S）/m2·m-3	133.5
总换热热阻（U）/J·m-2·K-1	16.8
不锈钢壁面比热容（c_p_w）/J·m-3·K-1	4000000
进料速度（y_F）/m·s-1	0.5
环境压力（p_H）/Pa	1.01×10⁵
吸附床床长（L）/m	1.2

吸附平衡等温线模型	R²
Langmuir模型	0.8286
Toth模型	0.7734
Sips模型	0.9987

表达式参数	参数数值	R²
$q m$	300	0.9764
K₀	7.159
Q	-10420
c₀	1.748
α	17.26

表达式参数	参数数值	R²
$q m$	300	0.9764
K₀	7.159
Q	-10420
c₀	1.748
α	17.26

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