柔性摩擦电压力传感器结构设计及应用的研究进展

doi:10.16085/j.issn.1000-6613.2023-1690

化工进展 ›› 2024, Vol. 43 ›› Issue (10): 5601-5611.DOI: 10.16085/j.issn.1000-6613.2023-1690

• 材料科学与技术 • 上一篇

柔性摩擦电压力传感器结构设计及应用的研究进展

王荟琪¹(), 张会¹^,²^,³^,⁴(), 李亚鹏¹^,²^,³^,⁴(), 冯伟¹, 武泽园¹, 李仕琳¹, 杨旋¹, 张建华¹

^1.陕西理工大学材料科学与工程学院，陕西汉中 723001
^2.起落架及飞机结构件加工检测陕西省高校工程研究中心，陕西汉中 723000
^3.陕西省“四主体一联合”飞机起落架先进制造及航空零组件性能测试校企联合研究中心，陕西汉中 723000
^4.陕西高校青年创新团队，陕西汉中 723000

收稿日期:2023-09-25 修回日期:2023-12-15 出版日期:2024-10-15 发布日期:2024-10-29
通讯作者: 张会,李亚鹏
作者简介:王荟琪（1998—），女，硕士研究生，研究方向为功能材料的开发与应用。E-mail：whq1998113@163.com。
基金资助:
陕西省科技厅工业攻关项目(2024GX-YBXM-376);陕西省秦创原“科学家+工程师”队伍项目(2022KXJ-139);陕西省重点产业链项目(2023-ZDLGY-28);陕西省重点研发计划(2022GY-416)

Research progress of structure design and application of flexible triboelectric pressure sensor

WANG Huiqi¹(), ZHANG Hui¹^,²^,³^,⁴(), LI Yapeng¹^,²^,³^,⁴(), FENG Wei¹, WU Zeyuan¹, LI Shilin¹, YANG Xuan¹, ZHANG Jianhua¹

^1.School of Materials Science and Engineering, Shaanxi University of Technology, Hanzhong 723000, Shaanxi, China
^2.Engineering Research Center of Manufacturing and Testing for Landing Gear and Aircraft Structural Parts, Hanzhong 723000, Shaanxi, China
^3.Research Center of Aircraft Landing Gear Advanced Manufacturing and Aviation Component Performance Test, Shaanxi Province, Hanzhong 723000, Shaanxi, China
^4.The Youth Innovation Team of Shaanxi Universities-Material Processing and Component Performance Testing of Aviation, Hanzhong 723000, Shaanxi, China

Received:2023-09-25 Revised:2023-12-15 Online:2024-10-15 Published:2024-10-29
Contact: ZHANG Hui, LI Yapeng

摘要/Abstract

摘要：

伴随着人工智能化和可持续能源的发展，柔性摩擦电压力传感器凭借轻量化、小尺寸、低能耗、可拉伸以及优异的电气性能等优点在人体运动及健康监测、智能医疗和人机交互等领域显现出强大的发展潜力。但是截至目前，对于柔性摩擦电压力传感器如何通过结构设计获得高指标性能是目前所面临的关键问题。在未来，柔性摩擦电压力传感器会更注重微结构的设计与传感性能的构建。因此，本文基于柔性摩擦电压力传感器的原理，总结并概述了影响柔性摩擦电压力传感器性能的核心因素，即核心元件材料的选择和结构设计。同时重点阐述了三种不同结构设计柔性摩擦电压力传感器的工作方式，揭示了不同类型的结构对其性能的影响。此外，还总结了该类传感器目前的应用领域及存在的瓶颈问题。最后指出了柔性摩擦电压力传感器未来的发展趋势，新型材料和结构设计有机结合将有利于进一步推进柔性摩擦电压力传感器实现量产化的市场需求。

关键词: 柔性摩擦电压力传感器, 传感原理, 传感材料, 结构设计

Abstract:

With the development of artificial intelligence and sustainable energy, the flexible triboelectric pressure sensor has the advantages of lightweight, small size, low energy consumption, stretchability and excellent electrical performance, and has shown strong development potential in the fields of human movement and health monitoring, smart healthcare and human-machine interaction. But up to now, how to obtain high performance of flexible triboelectric pressure sensor through structural design is a key problem. Flexible triboelectric pressure sensors will pay more attention to the design of microstructure and the construction of sensing performance in the future. Therefore, based on the principle of the flexible triboelectric pressure sensor, this paper summarized the core factors that affected the performance of the flexible triboelectric pressure sensor, namely, the selection of core component materials and structural design. At the same time, the working mode of three kinds of flexible triboelectric pressure sensors designed with different structures was introduced, and the influence of different types of structures on their performance was revealed. In addition, the current application fields and existing bottleneck problems of this kind of sensor were summarized. Finally, the future development trend was pointed out. The organic combination of new materials and structural design would be conducive to further promoting the market demand for mass production of flexible triboelectric pressure sensors.

Key words: flexible triboelectric pressure sensor, sensing principle, sensing material, structural design

中图分类号:

TB34

王荟琪, 张会, 李亚鹏, 冯伟, 武泽园, 李仕琳, 杨旋, 张建华. 柔性摩擦电压力传感器结构设计及应用的研究进展[J]. 化工进展, 2024, 43(10): 5601-5611.

WANG Huiqi, ZHANG Hui, LI Yapeng, FENG Wei, WU Zeyuan, LI Shilin, YANG Xuan, ZHANG Jianhua. Research progress of structure design and application of flexible triboelectric pressure sensor[J]. Chemical Industry and Engineering Progress, 2024, 43(10): 5601-5611.

图/表 10

图1 TENG的四种工作模式[23]

图2 垂直分离模式工作原理图[26]

图3 常规材料的摩擦电序列[28]（颜色越深，正/负电性越强）

表1 常用电极材料的TPSs性能

电极材料	检测区间/kPa	最大灵敏度	拉伸性/%	可重复性/周期	参考文献
Ag NWs	6.65~19.21	0.3086V/kPa	144.6	1200	[31]
Au NWs	40~100	0.0065V/kPa	115	5000	[32]
PEDOT-PSS	2~60	0.08/kPa	100	—	[33]
STCH	0~16.67	—	850	3000	[34]
CNTs	0~650	0.0479/kPa	—	2000	[37]
Gr	1.3~101.7	0.274V/kPa	—	2000	[38]
MXene/SEBS	4~100	6.03/kPa	34	10000	[41]
rGO/Ag NWs	0~5	78.4/kPa	200	10000	[42]

图4 复合电极材料的结构示意图和实物图

图5 不同几何微结构的实物图和输出性能

图6 LD-MN、HD-MN和OL-MN的输出性能及变形行为

图7 不同非几何结构的结构及输出性能

图8 不同仿生结构的结构及输出性能示意图

图9 TPSs在智能医疗、运动监测和人机交互方面的应用

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柔性摩擦电压力传感器结构设计及应用的研究进展

Research progress of structure design and application of flexible triboelectric pressure sensor

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