柔性可穿戴压阻式压力传感器研究进展

doi:10.16085/j.issn.1000-6613.2022-2228

摘要/Abstract

摘要：

伴随着数字医疗与制造业的进步，灵活柔韧的柔性可穿戴设备可以和人体表面完全贴合，从而对人体运动及健康信号等进行监测，从而实现多种传感功能。柔性可穿戴设备具有灵活性、体积可变、生物适应性好等优点，但仍然存在灵敏度低、检测范围有限、易受外界环境的干扰、可靠性低等问题。在柔性可穿戴设备中，一个关键器件就是用于压力检测的柔性压力传感器。在今后几年柔性可穿戴压力传感器会更加注重新型结构传感器的探索和整体高性能传感器的构建。本文概述了近年来柔性压力传感器的研究进展，并就压力传感器种类、工作机理、设计原则及最新进展进行了说明。通过近年来的文献重点对压阻式压力传感器在材料及器件设计等方面进行归纳整理与总结，并对压阻式压力传感器主要应用领域做了简单介绍。从压阻式压力传感器的结构设计及今后应用的角度出发，概述了压阻式压力传感器的可靠性及未来面临的挑战。

关键词: 压阻式压力传感器, 结构设计, 导电聚合物, 工作机理, 设计原则

Abstract:

Along with advances in digital healthcare and manufacturing, flexible and pliable wearable devices can fit perfectly with the surface of the human body to monitor human motion and health signals, etc., and thus enabling a variety of sensing functions. Flexible wearable devices have the advantages of flexibility, variable volume and good biological adaptability, but there are still problems such as low sensitivity, limited detection range and low reliability vulnerable to interference from the external environment. A key device in flexible wearable devices is the flexible pressure sensor for pressure detection. In the next few years, flexible wearable pressure sensors will pay more attention to the exploration of new structural sensors and the overall construction of high-performance sensors. This paper provided an overview of the research progress of flexible pressure sensors in recent years, and explained the types of pressure sensors, their operating mechanisms, design principles and recent advances. The recent literature focuses on piezoresistive pressure sensors in terms of materials and device design were summarized and the main application areas of piezoresistive pressure sensors were briefly introduced. The reliability of piezoresistive pressure sensors and future challenges were outlined from the perspective of structural design and future applications of piezoresistive pressure sensors.

Key words: piezoresistive pressure sensors, structural design, conductive polymers, working mechanism, design principles

中图分类号:

TP212

徐娜, 王国栋, 陶亚楠. 柔性可穿戴压阻式压力传感器研究进展[J]. 化工进展, 2023, 42(10): 5259-5271.

XU Na, WANG Guodong, TAO Yanan. Flexible wearable piezoresistive pressure sensors[J]. Chemical Industry and Engineering Progress, 2023, 42(10): 5259-5271.

图/表 10

图1 被测物理量不同的各类传感器

图2 不同结构压阻式压力传感器灵敏度对比

图3 不同制备方法的电容式传感器应变响应及示意图

图4 BTO纳米颗粒的表面修饰和制备的示意图及PDA@BTO/基于PVDF复合膜的柔性压力传感器的制备[26]

图5 摩擦电传感器的制备示意图

表1 不同类型压力传感器性能对比

压力传感器类型	工作原理	灵敏度	响应时间	线性范围	优点	不足
压阻式	压阻效应	较高	短	宽	结构简单、分辨率高，功耗低	灵敏度受温度影响较大
电容式	电容变化	相对较低	短	较小	具有良好的线性度和较低的压力检测极限	灵敏度受面积的限制，可靠性低
压电式	压电效应	高	较长	宽	体积小、动态性好、耐高温	电流响应较差，成本较高
摩擦电式	摩擦电和静电感应的耦合效应	高	短	较小	低成本、高输出性能、可持续性	可靠性低，受温度和湿度影响较大

图6 基于MX/rGO/P(VDF-TrFE)薄膜的传感器制造及传感机制示意图[40]

图7 应变传感器（由安装在食指和肘部的LR带组成）用于转换军事命令中使用的手势[57]

图8 压阻传感器在实时监测人类活动和物理信号中的应用[59]

图9 CNC/PSSH-PEDOT的实际应用：基于PSS/WPU的自供电传感器[62]

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