关键词: 切割废料, 晶体硅, 碳化硅, 回收

Abstract: The current situation of recovering cutting slurry waste was reviewed in this paper. Most recovery methods only consider recovering PEG and SiC，neglecting the more valuable silicon in the cutting slurry waste. The research progress of physical method，chemical method and indirect recovery for silicon was introduced. The current physical method such as physical settlement，heavy liquid separation，froth flotation，electrophores is separation，electric separation，high temperature treatment were also described. The chemical separation based on the differences of chemistry stability between SiC and Si were summarized. Their characteristics，advantages and disadvantages were compared. Due to the difficulties in recovering silicon on a large scale by those technologies，intensive research is still required in order to improve the yield and purity of silicon，reduce cost，and improve the work environment.

Key words: cutting slurry waste, crystalline silicon, SiC, recover