Chemical Industry and Engineering Progress ›› 2024, Vol. 43 ›› Issue (1): 501-513.DOI: 10.16085/j.issn.1000-6613.2023-0269
• Resources and environmental engineering • Previous Articles
WANG Bo(), ZHANG Chang’an(), ZHAO Limin, YUAN Jun, SONG Yongyi
Received:
2023-02-27
Revised:
2023-07-10
Online:
2024-02-05
Published:
2024-01-20
Contact:
ZHANG Chang’an
通讯作者:
张长安
作者简介:
王博(1994—),男,硕士,助理研究员,研究方向为化学气相沉积。E-mail:wangbo.fshy@sinopec.com。
基金资助:
CLC Number:
WANG Bo, ZHANG Chang’an, ZHAO Limin, YUAN Jun, SONG Yongyi. Industrial wastewater treatment technology based on boron-doped diamond electrodes:A review[J]. Chemical Industry and Engineering Progress, 2024, 43(1): 501-513.
王博, 张长安, 赵利民, 袁俊, 宋永一. 基于掺硼金刚石电极的工业废水处理研究进展[J]. 化工进展, 2024, 43(1): 501-513.
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URL: https://hgjz.cip.com.cn/EN/10.16085/j.issn.1000-6613.2023-0269
阳极材料 | 析氧过电位/V(vs.SHE) |
---|---|
石墨 | 1.7 |
Pt | 1.6~1.9 |
RuO2 | 1.4~1.7 |
IrO2 | 1.5~1.8 |
Ebonex® (Ti4O7) | 1.7~1.8 |
PbO2 | 1.8~2.0 |
SnO2 | 1.9~2.2 |
BDD | 2.2~2.6 |
阳极材料 | 析氧过电位/V(vs.SHE) |
---|---|
石墨 | 1.7 |
Pt | 1.6~1.9 |
RuO2 | 1.4~1.7 |
IrO2 | 1.5~1.8 |
Ebonex® (Ti4O7) | 1.7~1.8 |
PbO2 | 1.8~2.0 |
SnO2 | 1.9~2.2 |
BDD | 2.2~2.6 |
参数 | NeoCoat | 湖南新锋 | 参数 | NeoCoat | 湖南新锋 |
---|---|---|---|---|---|
基底 | 硅、金属(铌、钽、钨) | 硅、铌、钽、泡沫金属 | 基体厚度/mm | 1~2 | — |
电极形状 | 矩形、网状、定制形状 | 矩形、圆盘、网格、泡沫、定制形状 | 晶体尺寸/μm | — | 1~10 |
尺寸/mm | 矩形(100×100) 矩形(100×100) 定制形状(最大400×1200) | 矩形(1×1~350×350) 圆盘(ϕ1~350) 颗粒(2×10-4~30) | BDD涂层厚度/μm | — | 5~50 |
膜厚度均匀性 | ±5%(100mm) | — | |||
析氧过电位/V | — | 2.4~2.7 | |||
掺硼水平/μg·g-1 | 500~10000 | 5000~50000 | |||
应用条件 | 阴极/阳极/双极 | 阴极/阳极/双极 | |||
电阻率/mΩ·cm | 1~100 | 0.01~10 | |||
涂层面 | 单面/双面 | 单面/双面 |
参数 | NeoCoat | 湖南新锋 | 参数 | NeoCoat | 湖南新锋 |
---|---|---|---|---|---|
基底 | 硅、金属(铌、钽、钨) | 硅、铌、钽、泡沫金属 | 基体厚度/mm | 1~2 | — |
电极形状 | 矩形、网状、定制形状 | 矩形、圆盘、网格、泡沫、定制形状 | 晶体尺寸/μm | — | 1~10 |
尺寸/mm | 矩形(100×100) 矩形(100×100) 定制形状(最大400×1200) | 矩形(1×1~350×350) 圆盘(ϕ1~350) 颗粒(2×10-4~30) | BDD涂层厚度/μm | — | 5~50 |
膜厚度均匀性 | ±5%(100mm) | — | |||
析氧过电位/V | — | 2.4~2.7 | |||
掺硼水平/μg·g-1 | 500~10000 | 5000~50000 | |||
应用条件 | 阴极/阳极/双极 | 阴极/阳极/双极 | |||
电阻率/mΩ·cm | 1~100 | 0.01~10 | |||
涂层面 | 单面/双面 | 单面/双面 |
合成方法 | 原理 | 优势 | 劣势 | 最大电极尺寸 | 应用情况 |
---|---|---|---|---|---|
热丝法(HFCVD) | 利用金属丝(Ta、W)通电产生热量,激发气源形成等离子体,并在基底表面沉积成膜 | 工艺、设备简单,投资低,参数范围宽,通过合理的灯丝排布可实现大面积BDD电极制备[ | 成膜均匀性较差,易受灯丝气化污染,沉积速率低(1~10μm/h),对氧化性气体敏感 | 400mm×1200mm | 技术成熟,应用广泛。瑞士NeoCoat公司,德国DiaChem公司均有成熟产品,我国湖南新锋科技有限公司、北京沃尔德金刚石工具有限公司以及中南大学、吉林大学等均有广泛研究和成熟产品 |
微波等离子体法(MPCVD) | 利用微波辉光放电等离子体激发气源,在基底表面沉积成膜 | 成膜均匀,质量高,沉积温度低[ | 设备昂贵,有效沉积面积难扩大 | ϕ350mm | 技术成熟,但应用较少,德国Iplas公司具有专利产品(CYRANNUS®),国内武汉工程大学、北京科技大学、西南科技大学等均有相关研究 |
直流等离子体 喷射法(DCPJCVD) | 利用直流放电击穿流经阴阳极之间的气体形成电弧,气体被急剧加热后从等离子体炬喷口迅速喷出并在基底表面沉积成膜 | 金刚石沉积速率快[ | 设备昂贵,投资高,工艺控制困难,易对基底造成热损伤 | — | 多以实验室研究为主,尚无成熟产品 |
合成方法 | 原理 | 优势 | 劣势 | 最大电极尺寸 | 应用情况 |
---|---|---|---|---|---|
热丝法(HFCVD) | 利用金属丝(Ta、W)通电产生热量,激发气源形成等离子体,并在基底表面沉积成膜 | 工艺、设备简单,投资低,参数范围宽,通过合理的灯丝排布可实现大面积BDD电极制备[ | 成膜均匀性较差,易受灯丝气化污染,沉积速率低(1~10μm/h),对氧化性气体敏感 | 400mm×1200mm | 技术成熟,应用广泛。瑞士NeoCoat公司,德国DiaChem公司均有成熟产品,我国湖南新锋科技有限公司、北京沃尔德金刚石工具有限公司以及中南大学、吉林大学等均有广泛研究和成熟产品 |
微波等离子体法(MPCVD) | 利用微波辉光放电等离子体激发气源,在基底表面沉积成膜 | 成膜均匀,质量高,沉积温度低[ | 设备昂贵,有效沉积面积难扩大 | ϕ350mm | 技术成熟,但应用较少,德国Iplas公司具有专利产品(CYRANNUS®),国内武汉工程大学、北京科技大学、西南科技大学等均有相关研究 |
直流等离子体 喷射法(DCPJCVD) | 利用直流放电击穿流经阴阳极之间的气体形成电弧,气体被急剧加热后从等离子体炬喷口迅速喷出并在基底表面沉积成膜 | 金刚石沉积速率快[ | 设备昂贵,投资高,工艺控制困难,易对基底造成热损伤 | — | 多以实验室研究为主,尚无成熟产品 |
电流密度/mA·cm-2 | 时间/min | 能耗/kWh·kgCOD-1 | 费用①/EUR·kgCOD-1 |
---|---|---|---|
50 | 60 | 967 | 68 |
30 | 60 | 563 | 39 |
15 | 120 | 364 | 25 |
8 | 120 | 115 | 8 |
4 | 120 | 41 | 3 |
电流密度/mA·cm-2 | 时间/min | 能耗/kWh·kgCOD-1 | 费用①/EUR·kgCOD-1 |
---|---|---|---|
50 | 60 | 967 | 68 |
30 | 60 | 563 | 39 |
15 | 120 | 364 | 25 |
8 | 120 | 115 | 8 |
4 | 120 | 41 | 3 |
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