Abstract:

Along with advances in digital healthcare and manufacturing, flexible and pliable wearable devices can fit perfectly with the surface of the human body to monitor human motion and health signals, etc., and thus enabling a variety of sensing functions. Flexible wearable devices have the advantages of flexibility, variable volume and good biological adaptability, but there are still problems such as low sensitivity, limited detection range and low reliability vulnerable to interference from the external environment. A key device in flexible wearable devices is the flexible pressure sensor for pressure detection. In the next few years, flexible wearable pressure sensors will pay more attention to the exploration of new structural sensors and the overall construction of high-performance sensors. This paper provided an overview of the research progress of flexible pressure sensors in recent years, and explained the types of pressure sensors, their operating mechanisms, design principles and recent advances. The recent literature focuses on piezoresistive pressure sensors in terms of materials and device design were summarized and the main application areas of piezoresistive pressure sensors were briefly introduced. The reliability of piezoresistive pressure sensors and future challenges were outlined from the perspective of structural design and future applications of piezoresistive pressure sensors.

Key words: piezoresistive pressure sensors, structural design, conductive polymers, working mechanism, design principles

摘要：

伴随着数字医疗与制造业的进步，灵活柔韧的柔性可穿戴设备可以和人体表面完全贴合，从而对人体运动及健康信号等进行监测，从而实现多种传感功能。柔性可穿戴设备具有灵活性、体积可变、生物适应性好等优点，但仍然存在灵敏度低、检测范围有限、易受外界环境的干扰、可靠性低等问题。在柔性可穿戴设备中，一个关键器件就是用于压力检测的柔性压力传感器。在今后几年柔性可穿戴压力传感器会更加注重新型结构传感器的探索和整体高性能传感器的构建。本文概述了近年来柔性压力传感器的研究进展，并就压力传感器种类、工作机理、设计原则及最新进展进行了说明。通过近年来的文献重点对压阻式压力传感器在材料及器件设计等方面进行归纳整理与总结，并对压阻式压力传感器主要应用领域做了简单介绍。从压阻式压力传感器的结构设计及今后应用的角度出发，概述了压阻式压力传感器的可靠性及未来面临的挑战。

关键词: 压阻式压力传感器, 结构设计, 导电聚合物, 工作机理, 设计原则