化工进展 ›› 2023, Vol. 42 ›› Issue (11): 6076-6085.DOI: 10.16085/j.issn.1000-6613.2022-2371

• 资源与环境化工 • 上一篇    

离子改性的CON材料用于吸附分离NF3

伍岳1(), 李晓宇1, 陶春珲1, 张莹2, 李印辉1, 张文祥1, 杨伯伦1, 马和平1()   

  1. 1.西安交通大学化学工程与技术学院,陕西 西安 710000
    2.西安交通大学化学学院,陕西 西安 710000
  • 收稿日期:2022-12-28 修回日期:2023-02-28 出版日期:2023-11-20 发布日期:2023-12-15
  • 通讯作者: 马和平
  • 作者简介:伍岳(1994—),男,博士研究生,研究方向为气体吸附分离。E-mail:wuyue2507@stu.xjtu.edu.cn
  • 基金资助:
    国家自然科学基金(22178280);核数据基础重点实验室项目(JCKY2021201C151);西安交通大学“青年拔尖人才”项目(HG6J001)

Adsorptive separation of NF3 using ion-modified CON material

WU Yue1(), LI Xiaoyu1, TAO Chunhui1, ZHANG Ying2, LI Yinhui1, ZHANG Wenxiang1, Yang Bolun1, MA Heping1()   

  1. 1.School of Chemical Engineering and Technology, Xi’an Jiaotong University, Xi’an 710000, Shaanxi, China
    2.School of Chemistry, Xi’an Jiaotong University, Xi’an 710000, Shaanxi, China
  • Received:2022-12-28 Revised:2023-02-28 Online:2023-11-20 Published:2023-12-15
  • Contact: MA Heping

摘要:

从半导体刻蚀废气中吸附分离NF3具有重要的工业应用价值。通过在多孔有机分子笼(cage-like organic network,CON)中引入碘离子,制得了高NF3吸附选择性的离子型吸附剂(I-CON)。DFT理论计算表明,碘离子的引入在吸附剂孔道表面形成了离子化的电场环境,使被吸附的NF3分子发生诱导极化,因此增强了材料对NF3的吸附能力。单组分气体吸附测试结果表明,相较于CON,I-CON对NF3的吸附容量从30.49mL/g提高到45.13mL/g,理想吸附溶液理论选择性从10.59~15.49提高到15.01~19.47;在穿透曲线测试中,I-CON也比CON表现出更强的NF3动态吸附能力。以上结果证实了离子改性能够增强材料对NF3的吸附分离性能,为分离与回收NF3提供了技术参考。

关键词: 多孔有机材料, 离子型吸附剂, 吸附分离, 三氟化氮, 含氟电子气体

Abstract:

Adsorptive separation of NF3 from semiconductor exhaust gases has become an increasingly important topic in industrial applications. By introducing iodine ions into cage-like organic network (CON), quaternized I-CON material was prepared. The DFT calculation revealed that the electric field was formed on the pore surface by introducing iodide ions, which enhanced the inducing force between NF3 molecule and I-CON framework. Compared with CON, the NF3 adsorption capacity of I-CON increased from 30.49mL/g to 45.13mL/g and the IAST selectivity increased from 10.59—15.49 to 15.01—19.47 according to the single-component gas adsorption results. Moreover, the dynamic adsorption selectivity of I-CON was also higher than that of CON in the breakthrough tests. Thus, separation ability of CON could be effectively improved by ion modification, showing its potential for the real-world NF3 capture and enrichment.

Key words: porous organic material, ionic adsorbent, adsorptive separation, nitrogen trifluoride, fluorinated greenhouse gases

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