关键词: HF, 分子模拟, 回收, 解吸脱附, 能耗, 变温吸附

Abstract: The recovery of electronic-grade hydrogen fluoride (HF) gas has good economic, environmental and social benefits. However, the problem of high energy consumption for adsorption recovery limits its further development, and the research on energy conservation and consumption reduction has not been conducted in this field. The calculation model of energy consumption of adsorption cycle is established, and the performance of adsorption cycle is studied exploratively. The adsorption equilibrium isotherm data of HF is calculated by molecular simulation technique. The numerical model of temperature swing adsorption (TSA) is established. The effects of operation parameters, such as adsorption temperature and pressure, on the energy-efficiency of TSA cycle is analyzed, in order to explore the direction of reducing energy consumption and improving efficiency. The results show that when the adsorption temperature reduces from 298 K to 288 K, the recycling energy consumption per unit of quality HF reduces from 14.0912 MJ/kg to 3.1173 MJ/kg, and the energy utilization efficiency increases from 0.02 to 0.0953. Moreover, as the desorption temperature increases from 340 K to 350 K, the recycling energy consumption per unit of quality HF reduces from 14.0912 MJ/kg to 12.0037 MJ/kg, and the energy utilization efficiency increases from 0.02 to 0.0247. It means that the reduction of adsorption temperature has a more obvious effect on the reduction of energy consumption and the improvement of energy efficiency. In addition, the increase of the intake concentration has a positive effect on all indexes. The temperature difference between the heat and cold source and the adsorption and desorption temperature only has a positive effect on the yield. The increase of adsorption pressure has little influence on the indexes other than recovery rate.

Key words: HF, molecular simulation, recovery, desorption, energy consumption, temperature swing adsorption