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Research status on recovery of wire sawing slurry of crystalline silicon

HE Simiao,YUAN Shouqian,ZHU Lifang   

  1. Metallurgical School,Xi’an University of Architecture and Technology,Xi’an 710055,Shaanxi,China
  • Online:2013-04-05 Published:2013-04-05

晶体硅切割废料回收的研究现状

何思邈,袁守谦,朱丽芳   

  1. 西安建筑科技大学冶金工程学院,陕西 西安710055

Abstract: The current situation of recovering cutting slurry waste was reviewed in this paper. Most recovery methods only consider recovering PEG and SiC,neglecting the more valuable silicon in the cutting slurry waste. The research progress of physical method,chemical method and indirect recovery for silicon was introduced. The current physical method such as physical settlement,heavy liquid separation,froth flotation,electrophores is separation,electric separation,high temperature treatment were also described. The chemical separation based on the differences of chemistry stability between SiC and Si were summarized. Their characteristics,advantages and disadvantages were compared. Due to the difficulties in recovering silicon on a large scale by those technologies,intensive research is still required in order to improve the yield and purity of silicon,reduce cost,and improve the work environment.

Key words: cutting slurry waste, crystalline silicon, SiC, recover

摘要: 晶体硅棒在加工成硅片的切割过程中产生了大量的切割废料。本文回顾了废料回收主要局限于回收聚乙二醇和碳化硅的现状,然而废料中的硅具有更大的回收价值。介绍了目前硅粉回收技术中物理方法、化学方法和间接回收的研究进展,重点阐述了物理沉降、重液分离、泡沫浮选、电泳分离、电选分离、高温处理等物理方法和利用碳化硅与硅化学稳定性的差异进行的化学分离的研究现状,评述和比较了各种方法的特点和优缺点。指出在现有的回收技术中要实现规模回收硅粉还存在较大的困难,需要通过深入广泛的研究,提高硅粉的回收率和纯度,降低成本,改善工作环境。

关键词: 切割废料, 晶体硅, 碳化硅, 回收

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