硅烷流化床制备粒状多晶硅的研究进展

doi:10.16085/j.issn.1000-6613.2016.11.002

摘要/Abstract

摘要： 硅烷流化床生产粒状多晶硅的技术具有节能、高效、环境友好等优点，是生产太阳能级多晶硅的首选工艺技术，但国内对于该工艺技术的研究仍处于起步阶段。本文简介了硅烷流化床的基本原理，包括操作原理和反应模型，并讨论了温度、硅烷分压、颗粒尺寸以及流化速度等反应条件对硅烷流化床内流动稳定性和硅粉尘产生的影响。根据发展硅烷流化床所面临的热壁沉积、产生硅粉尘、加热方式的选择、硅晶种的获得、气体分布方式的控制以及产品纯度的控制等技术挑战，分析了不同的流化床设计对这些技术挑战的解决方案，指出了不同的流化床设计的优缺点与工业应用前景。讨论了硅烷流化床的CFD模拟与一般的流态化模拟的区别，并回顾了相关的研究工作。最后指明了对硅烷流化床技术的研究应从优化反应条件、改善反应器设计以及完善多尺度模拟硅烷流化床的模型三个方面着手。

关键词: 流化床, 热解, 团聚, 粒状多晶硅, 硅粉尘, 计算流体力学

Abstract: As energy-efficient, high-performance and environment-friendly method the fluidized-bed silane pyrolysis makes its potential to become the dominating way for production of granular polysilicon, while the domestic research on this process is still in its infancy. The review starts with a brief induction of the basic principle of fluidized-bed silane pyrolysis, including the operating principle and the reaction model, and discusses the effects of temperature, silane concentration, particle size and gas flow rate on stable fluidization and fines formation. Developing the technology of fluidized-bed silane pyrolysis faces many technical challenges, such as fines formation, unwanted depositions on internals, heating and temperature control, seed particles generation, gas distribution and quality. The advantages and disadvantages of solutions of these technical challenges are summarized by analyzing different fluidized-bed reactor designs and the industrial application prospects of these solutions are pointed out. The difference between the CFD simulation of the fluidized-bed silane pyrolysis and the general fluidization is discussed and related researches are reviewed. Finally, the review proposes that the domestic research on fluidized-bed silane pyrolysis should put emphasis on optimizing the reaction conditions, improving fluidized-bed designs and completing the multi-scale model of fluidized-bed silane pyrolysis.

Key words: fluidized-bed, fluidization, agglomeration, granular polysilicon, silicon fines, CFD

中图分类号:

TQ127.2

田博, 黄国强. 硅烷流化床制备粒状多晶硅的研究进展[J]. 化工进展, 2016, 35(11): 3392-3399.

TIAN Bo, HUANG Guoqiang. Research progress on preparation of granular polysilicon by fluidized-bed silane pyrolysis[J]. Chemical Industry and Engineering Progree, 2016, 35(11): 3392-3399.

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