关键词: 多晶硅, 氯硅烷残液, 六氯二硅烷, 残液回收, 多晶硅, 氯硅烷残液, 六氯二硅烷, 残液回收

Abstract: Hexachlorodisilane in chlorosilane residue from polysilicon production could be a valuable product. Research on this subject abroad has obtained attention from various research institutes，but domestic research does not have much experience in this area. This paper introduced a new process of recycling hexachlorodisilane from chlorosilane residue. The combination of filter and five distillation columns was used in the process，and Aspen Plus software was chosen as the simulation method. The results demonstrated that the process was feasible to recover hexachlorodisilane and the purity can achieve 99.8wt%. The influences of reflux ratio，feed location and product mass rate on the separation effects were investigated using sensitivity analysis. The optimal operational parameters were determined. An economic estimation showed that this process could have considerable potential benefits.

Key words: polysilicon, chlorosilane residue, hexachlorodisilane, waste recycling, polysilicon, chlorosilane residue, hexachlorodisilane, waste recycling