Abstract: This review starts with a brief introduction of the background and status of polysilicon production，followed by the plight in polisilicon industry and the general treatment method of silicon tetrachloride. The composition of silicon tetrachloride waste and difficulties in treatment are discussed. Methods for the treatment of silicon tetrachloride waste in polysilicon production，including hydrolysis，filter，drying，combustion etc，are introduced. Comprehensive classification and discussion of all the methods are conducted. The future application is also discussed.

Key words: polysilicon, silicon tetrachloride, chlorosilane , waste treatment, polysilicon, silicon tetrachloride, chlorosilane, waste treatment

摘要： 阐述了多晶硅行业的生产背景和现状，介绍了多晶硅行业现今所面临的困境和多晶硅生产中副产物四氯化硅的一般处理方法，并讨论了多晶硅生产中四氯化硅残液的组成和处理难点，概述了多晶硅生产中四氯化硅残液的各种处理方法，主要是水解法、过滤法、干燥法、燃烧法等。对各种处理方法进行了综合性的分类与讨论，并指出了现存方法的优缺点，展望了各种方法的应用前景。

关键词: 多晶硅, 四氯化硅, 氯硅烷, 残液处理, 多晶硅, 四氯化硅, 氯硅烷, 残液处理