陶瓷基微反应器制备的研究进展

doi:10.16085/j.issn.1000-6613.2018-2106

摘要/Abstract

摘要：

微反应器中亚毫米级的流体通道具有高效的传质传热效应，使其能够强化反应过程。随着微细加工技术的发展，制备出了耐高温耐腐蚀的陶瓷基微反应器，适用于更严苛的反应条件，然而陶瓷基微反应器的制备存在微结构成型工艺复杂、密封难度较大等问题。本文主要介绍不同陶瓷材料微反应器的制备工艺，重点论述陶瓷基微反应器制备过程中常规微加工技术的优化和新型微加工技术的引入，对比这些技术对微结构成型的改善效果。列举常用的陶瓷微通道密封连接方法，概述其特点和适用范围。并提出在陶瓷基微反应器制备的后续研究过程中，应注重陶瓷基微反应器制备的成功率和新技术的开发，完善陶瓷基微反应器的性能，将陶瓷基微反应器引入到更广泛的应用体系中。

关键词: 陶瓷微反应器, 微通道, 微加工, 微反应技术

Abstract:

The microchannel of the microreactor enables it to have high efficient mass and heat transfer, which can strengthen the reaction process. With the development of micromachining technology, the ceramic microreactors with the advantages of overcoming high temperature and chemical resistance have been processed, which can be applied to more severe reaction conditions. However, ceramic microreactors need complicated producting process. In this paper, the microfabrication of different materials was mainly introduced. The conventional microfabrication technology and the new microfabrication technology were discussed in detail, which improve the microfabrication of the microchannels. At the same time, the sealed connection methods of ceramic microchannels were briefly listed, and their characteristics and application ranges were summarized. It was proposed to focus on the qualified rate of ceramic microreactors and the development of new technology in the future study. The performance of ceramic microreactors should be improved, and expands the application range of ceramic microreactors.

Key words: ceramic microreactors, microchannels, microfabrication, microreaction technology

中图分类号:

刘润阳,颜婷珪,张婷,田蒙奎. 陶瓷基微反应器制备的研究进展[J]. 化工进展, 2019, 38(08): 3508-3516.

Runyang LIU,Tinggui YAN,Ting ZHANG,Mengkui TIAN. A review on the microfabrication of ceramic microreactors[J]. Chemical Industry and Engineering Progress, 2019, 38(08): 3508-3516.

图/表 7

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基本尺度	范围
通道尺寸/mm	0.05～1.0
截面积/mm²	0.002～1.0
表面积/mm²	2.0～200.0
通道体积/mm³	0.1～50.0
气体通量/mL·min^-1	1～1000
液体通量/μL·min^-1	1～10000

基本尺度	范围
通道尺寸/mm	0.05～1.0
截面积/mm²	0.002～1.0
表面积/mm²	2.0～200.0
通道体积/mm³	0.1～50.0
气体通量/mL·min^-1	1～1000
液体通量/μL·min^-1	1～10000

序号	参考文献	微反应器设计参数	微加工工艺	应用
1	Knitter等^[27]	氧化铝基，16个微通道，微通道高600μm，宽400μm	平版印刷，低压注塑	催化剂快速筛选，甲烷的氧化偶联
2	Wang等^[28]	氧化铝基，14个微通道，微通道高400μm，宽300μm	深度X射线光刻，失模技术，压膜成型	乙醇蒸汽重整
3	Sullivan等^[29]	氧化铝基，10个通道，微通道高550μm	高压层压，叠层共烧	冷热交换，甲烷蒸汽重整
4	Aran等^[34]	氧化铝基，单通道，微通道高500μm，宽1000μm	机械微加工，热处理	光催化降解
5	Meschke等^[35]	碳化硅基，13个通道，微通道高1500μm，宽1500μm	机械微加工，叠层共烧	流体换热
6	Stephen等^[36]	碳化硅基，单通道和混合通道，微通道高600μm，上底宽700μm，下底宽300μm	激光切割，等静压共烧	高温还原
7	Okamasa等^[38]	低温共烧生瓷片，单通道和腔室	低温共烧技术，钎焊技术密封	正丁烷催化
8	Karol等^[39]	低温共烧生瓷片，单通道和腔室	丝网印刷，牺牲模板，低温共烧技术	研究牺牲模板
9	Jiang等^[41]	低温共烧生瓷片，微通道宽500 μm	机械微加工，多步低压层压	高温产氢
10	Pedro等^[42]	低温共烧生瓷片，单通道和三进料口	机械微加工，低温共烧技术	纳米晶体生成
11	Malecha等^[46]	低温共烧生瓷片，单通道，微通道高750μm，宽500μm	丝网印刷，陶瓷与聚合物键合，低温共烧技术	荧光检测
12	Ren等^[53]	无机硅聚合物，单通道，微通道高50μm，宽500μm	机械微加工，丝网印刷，模塑成型	合成纳米颗粒

序号	参考文献	微反应器设计参数	微加工工艺	应用
1	Knitter等^[27]	氧化铝基，16个微通道，微通道高600μm，宽400μm	平版印刷，低压注塑	催化剂快速筛选，甲烷的氧化偶联
2	Wang等^[28]	氧化铝基，14个微通道，微通道高400μm，宽300μm	深度X射线光刻，失模技术，压膜成型	乙醇蒸汽重整
3	Sullivan等^[29]	氧化铝基，10个通道，微通道高550μm	高压层压，叠层共烧	冷热交换，甲烷蒸汽重整
4	Aran等^[34]	氧化铝基，单通道，微通道高500μm，宽1000μm	机械微加工，热处理	光催化降解
5	Meschke等^[35]	碳化硅基，13个通道，微通道高1500μm，宽1500μm	机械微加工，叠层共烧	流体换热
6	Stephen等^[36]	碳化硅基，单通道和混合通道，微通道高600μm，上底宽700μm，下底宽300μm	激光切割，等静压共烧	高温还原
7	Okamasa等^[38]	低温共烧生瓷片，单通道和腔室	低温共烧技术，钎焊技术密封	正丁烷催化
8	Karol等^[39]	低温共烧生瓷片，单通道和腔室	丝网印刷，牺牲模板，低温共烧技术	研究牺牲模板
9	Jiang等^[41]	低温共烧生瓷片，微通道宽500 μm	机械微加工，多步低压层压	高温产氢
10	Pedro等^[42]	低温共烧生瓷片，单通道和三进料口	机械微加工，低温共烧技术	纳米晶体生成
11	Malecha等^[46]	低温共烧生瓷片，单通道，微通道高750μm，宽500μm	丝网印刷，陶瓷与聚合物键合，低温共烧技术	荧光检测
12	Ren等^[53]	无机硅聚合物，单通道，微通道高50μm，宽500μm	机械微加工，丝网印刷，模塑成型	合成纳米颗粒

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