Abstract: Vanadium dioxide（VO₂）single crystals undergo a first order transition from semiconductor to metallic state at approximately 68℃. Associated with the phase transition are the considerable changes in its electrical，magnetic and light characteristics，it can be widely used in thermal，electrical switching elements，optical storage media devices and sensitive sensor and solar energy control of windows. The film of VO2 stably exists in a narrow range of composition，and it is difficult to get pure VO₂. Much work has been done to investigate the film of VO2. This paper summarizes the recent progress of the preparation method of VO2 thin film since 2000 and the influence of various preparation methods upon the properties of the thin film are compared. To expand its application，the newest development of the VO₂ thin film is introduced，and its future research is also discussed.