Abstract: Hexachlorodisilane in chlorosilane residue from polysilicon production could be a valuable product. Research on this subject abroad has obtained attention from various research institutes，but domestic research does not have much experience in this area. This paper introduced a new process of recycling hexachlorodisilane from chlorosilane residue. The combination of filter and five distillation columns was used in the process，and Aspen Plus software was chosen as the simulation method. The results demonstrated that the process was feasible to recover hexachlorodisilane and the purity can achieve 99.8wt%. The influences of reflux ratio，feed location and product mass rate on the separation effects were investigated using sensitivity analysis. The optimal operational parameters were determined. An economic estimation showed that this process could have considerable potential benefits.

Key words: polysilicon, chlorosilane residue, hexachlorodisilane, waste recycling, polysilicon, chlorosilane residue, hexachlorodisilane, waste recycling

摘要： 多晶硅残液中的六氯二硅烷具有高附加值，国外已开展相关研究，而国内这方面研究仍处于空白阶段。对此，本文提出了一种从多晶硅氯硅烷残液回收六氯二硅烷的新工艺。工艺通过采用过滤器与五精馏塔耦合完成残液回收，利用Aspen Plus软件对工艺进行了模拟计算，结果表明，本工艺能够有效回收六氯二硅烷，纯度（质量分数）可达99.8%。使用灵敏度分析考察了回流比、进料位置、采出量等对分离效果的影响，确定了最优工艺操作参数。最后评价了工艺的整体经济效应，结果表明本工艺存在很大的潜在效益。

关键词: 多晶硅, 氯硅烷残液, 六氯二硅烷, 残液回收, 多晶硅, 氯硅烷残液, 六氯二硅烷, 残液回收