Abstract: Reactor geometry has important effects on recirculation cells in reactor chamber. Recirculation cells above substrate affect not only thickness of film but also deposition rate uniformity. By modifying the reactor geometry into streamlined shape，the recirculation cells can be reduced even eliminated so that smooth and rectilinear flow prevails in the susceptor region. Among geometric parameters which affect natural convection， the reactor height plays the major role while the reactor diameter plays minor role. For optimized-shape reactor，the critical height for the onset of natural convection is about 2.5cm for D=20cm and 2cm for D=40cm at reference condition.

摘要： 研究了金属有机化学气相沉淀反应器的几何形状对于反应腔内的涡旋产生的影响，表明衬底上方的涡旋不仅会影响到薄膜生长的厚度，而且会影响到薄膜的纯度和成分的均匀性。通过改变反应器的结构和形状来优化反应器设计，从而消除衬底上方的涡旋，得到光滑而均匀的流场。根据模拟结果发现，流道高度在影响热对流涡旋的几何参数中起主要作用，而流道长度影响较小。对于优化后的反应器，引发自然对流的临界流道高度为H=2.5 cm（D=20 cm）。