硅基前体在先进集成电路制造中的应用与技术进展
刘见华, 袁振军, 常欣, 赵喜哲, 万烨, 余学功, 杨德仁
Application and technological progress of silicon-based precursors in advanced integrated circuit manufacturing
LIU Jianhua, YUAN Zhenjun, CHANG Xin, ZHAO Xizhe, WAN Ye, YU Xuegong, YANG Deren
化工进展
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2025, (9): 5255
-5264
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DOI: 10.16085/j.issn.1000-6613.2024-1079