三氯氢硅在氢气氛中的热分解及还原体系的反应分子动力学模拟
李艳平, 杨涛, 王洪勋, 张城, 温国胜, 韩治成, 蓝公家, 严大洲
Reaction molecular dynamics simulation of the thermal decomposition and reduction system of trichlorosilane in a hydrogen atmosphere
LI Yanping, YANG Tao, WANG Hongxun, ZHANG Cheng, WEN Guosheng, HAN Zhicheng, LAN Gongjia, YAN Dazhou
化工进展
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2025, (8): 4322
-4330
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DOI: 10.16085/j.issn.1000-6613.2024-2084