Abstract:

Process simulation of synthesis and separation of trichlorosilane is realized by ChemCAD，based on the design data of 7000t/a trichlorosilane. The treatment of the exhaust gas from trichlorosilane synthesis has been improved by simulation result. In original condition，waste gas is separated from synthesis gas cryogenically，and then piped into waste deposal system；while in new condition，cryogenic gas in original condition is further compressed and separated cryogenically. The exhaust gas emission is reduced by about 8%，which make the process more favorite in both environment and economy.

摘要：

通过ChemCAD流程模拟软件对实际年产7000 t三氯氢硅的生产流程进行模拟、分析，改进三氯氢硅合成所产生尾气的处理。原工况为合成气深冷分离废气进入三废系统，新工况将原工况的深冷后的气体压缩后再次深冷分离。使废气的排放量减小至原工艺的8%左右，减少了尾气排放的污染，产生了良好的经济和环境效益。