Abstract: Silicon-based nanomaterials can be widely used in optics，semiconductors，and materials science because of their special structures and properties. Anodic aluminum oxide (AAO) template on silicon substrate has its advantages over aluminum substrate on nanofunctional devices integration. In this paper，the preparation and oxidization process of the silicon-based AAO template are analyzed，and several kinds of nanoarrays growing on silicon-based AAO template are reviewed. Finally，the performance of some silicon-based nanostrctural arrays is summarized.

摘要： 硅基纳米材料结构与性能独特，在光学、半导体和材料科学等领域具有广阔的应用前景。本文介绍了硅基阳极氧化铝模板相对于铝基模板在集成纳米功能器件方面的优势及其制备方法，对阳极氧化工艺过程进行了分析，并对几种基于硅基AAO模板组装的纳米阵列进行了综述，总结了硅基纳米结构阵列性能的研究概况。