Calibration technique of micro-liquid flow

doi:10.16085/j.issn.1000-6613.2023-1355

Abstract

Abstract:

Micro-liquid flow is widely used in microreactors, which has the advantages of high heat and mass transfer efficiency, high throughput, integration, and easy control. Micro-liquid flowmeter can achieve accurate control of samples. At meager flow rates (μL/min to nL/min), however, micro-liquid flowmeter has problems such as incomplete measurement standards and difficult calibration. Several calibration techniques used in the field of micro-liquid flow measurement are summarized, including the mass method and volumetric method. The calibration range and uncertainty of these techniques are given according to the existing research. The analysis shows that the current mass method calibration technology is still insufficient in the application of micro-liquid flow, and the influence of multiple action mechanisms needs to be further studied. The volumetric method can be achieved by different means. Although this method is still in the exploration stage, it is expected to become a more promising method in the future. Finally, combined with the development of micro-liquid flow measurement technology and the construction of an advanced measurement system, the development prospect of micro-liquid flow measurement is forecasted.

Key words: microreactor, microfluidics, measurement, calibration technique

摘要：

微小液体被广泛应用于微反应器中，具有传热传质效率高、高通量、集成化、方便控制等优势，微小液体流量计可以实现对样品的精确控制，但在极低流量下（μL/min乃至nL/min），微小液体流量计存在计量基标准不完善、校准难度大等问题。本文综述了目前在微小液体流量计量领域所采用的几种校准技术，主要包括质量法和体积法，并根据现有的研究给出了这些技术目前所能达到的校准范围和不确定度。分析表明，现有的质量法微小液体流量校准技术在应用于微小液体时仍具有不足，需要进一步研究多种作用机制的影响；体积法微小液体流量校准技术有多种实现方式，虽然目前仍处于探索阶段，但在未来有望成为更具有研究前景的一种方法。最后，结合微小液体流量计量技术的发展和先进测量体系的建设，展望了微小液体流量计量的发展前景。

关键词: 微反应器, 微流体学, 测量, 校准技术

CLC Number:

TB937

HOU Likai, FAN Xu, BAO Fubing. Calibration technique of micro-liquid flow[J]. Chemical Industry and Engineering Progress, 2024, 43(2): 579-585.

侯立凯, 范旭, 包福兵. 微小液体流量校准技术[J]. 化工进展, 2024, 43(2): 579-585.

Figures/Tables 5

References 32

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机构名称	设计特点	校准范围（体积流量和质量流量）	不确定度（k=2）/%
METAS	恒压驱动，防蒸发阱	0.1~1000μL/min 0.006~60g/h	0.6~0.1
法国气动和热工业技术中心（CETIAT）	恒温，防蒸发阱	16.6μL/min~167mL/min 0.001~5000g/h	0.6~0.1
英国贸易和工业部（DTI）	温度控制，稳定性控制，油封法	0.017μL/min~10mL/min 0.001~600g/h	5~0.05
葡萄牙质量研究所（IPQ）	双量程系统，防蒸发阱，蒸发修正	0.05μL/min~10mL/min 0.003~600g/h	6~0.15
荷兰国家计量标准研究所（VSL）	科里奥利流量控制器驱动，加盖防蒸发	4.2μL/min~83mL/min 0.25~5000g/h	1~0.05
荷兰布朗克霍斯特公司（Bronkhorst）	动态称重，油封法	16.6μL/min~3.33mL/min 1~200g/h	0.62~0.06

机构名称	设计特点	校准范围（体积流量和质量流量）	不确定度（k=2）/%
METAS	恒压驱动，防蒸发阱	0.1~1000μL/min 0.006~60g/h	0.6~0.1
法国气动和热工业技术中心（CETIAT）	恒温，防蒸发阱	16.6μL/min~167mL/min 0.001~5000g/h	0.6~0.1
英国贸易和工业部（DTI）	温度控制，稳定性控制，油封法	0.017μL/min~10mL/min 0.001~600g/h	5~0.05
葡萄牙质量研究所（IPQ）	双量程系统，防蒸发阱，蒸发修正	0.05μL/min~10mL/min 0.003~600g/h	6~0.15
荷兰国家计量标准研究所（VSL）	科里奥利流量控制器驱动，加盖防蒸发	4.2μL/min~83mL/min 0.25~5000g/h	1~0.05
荷兰布朗克霍斯特公司（Bronkhorst）	动态称重，油封法	16.6μL/min~3.33mL/min 1~200g/h	0.62~0.06

机构/研究人员	技术路线	校准范围（体积流量）	不确定度（k=2）/%
吕贝克应用技术大学^[21]（University of Applied Sciences Lübeck）	FTM	50nL/min~500μL/min	4
CETIAT^[22]	FTM	1nL/min~16μL/min	0.15~11
IPQ^[23]	FTM	最低16.67nL/min	7
IPQ^[14]	干涉测量法	最低16.67nL/min	2.9
Hahn-Schickard公司^[29]	micro-PIV	70~200nL/min	4.2~5.6

机构/研究人员	技术路线	校准范围（体积流量）	不确定度（k=2）/%
吕贝克应用技术大学^[21]（University of Applied Sciences Lübeck）	FTM	50nL/min~500μL/min	4
CETIAT^[22]	FTM	1nL/min~16μL/min	0.15~11
IPQ^[23]	FTM	最低16.67nL/min	7
IPQ^[14]	干涉测量法	最低16.67nL/min	2.9
Hahn-Schickard公司^[29]	micro-PIV	70~200nL/min	4.2~5.6

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