Reaction molecular dynamics simulation of the thermal decomposition and reduction system of trichlorosilane in a hydrogen atmosphere
LI Yanping, YANG Tao, WANG Hongxun, ZHANG Cheng, WEN Guosheng, HAN Zhicheng, LAN Gongjia, YAN Dazhou
Chemical Industry and Engineering Progress . 2025, (8): 4322 -4330 .  DOI: 10.16085/j.issn.1000-6613.2024-2084

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