Removal of trace NF3 impurities from electronic grade CF4 by adsorption
FU Yu, LI Xiaoyu, WU Yue, TAO Chunhui, DUAN Ran, ZHANG Wenxiang, MA Heping
Chemical Industry and Engineering Progress . 2025, (6): 3570 -3578 .  DOI: 10.16085/j.issn.1000-6613.2024-0718

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